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HOME > PRODUCT > ¿þÀÌÇÁ&¾àÇ°·ù
MICROCHEM / Developer
 
 
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¢¹Appearance : Clear colorless liquid
¢¹Oddor : Amine
¢¹Boiling Point  : 100 ¨¬C (212 ¨¬F)
¢¹Specific Gravity  : 1.00
¢¹Vapor Pressure : Data not available
¢¹Vapor Densitty: Data not available
¢¹H2O Solubility  : 100% @ 20 ¨¬C, by wt.
¢¹% Volatiles : <1% by wt
¢¹Evaporation Rate : Slower than ether
¢¹Flash Point  : Nonflammable
¢¹Autoignition Temp. : Not Determined

                



   
MC-660-01 101 A Developer 101 Developer, ¿ë·®£º4L/Bottle °ßÀû ¹®ÀÇ
MICROCHEM / Developer(MIBK)
 
 

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¢¹PMMA¿Í Copolymer Resist¿¡ ÃÖÀûÈ­ µÇ¾îÀÖ½À´Ï´Ù. 

¢¹E-beam lithography °øÁ¤¿ë developer

¢¹Spray¿Í Immersion Processes·Î »ç¿ë °¡´ÉÇÕ´Ï´Ù.
¢¹sub 0.1§­ resolution



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¢¹ 4L/bt or 4Lbt x 4/1Box

 

   
MC-MIBK-11 MIBK MIBK, ¿ë·®£º4Lx4bt/Box °ßÀû ¹®ÀÇ
MC-MIBK-12 MIBK:IPA 1:1 MIBK:IPA/1:1, ¿ë·®£º4Lx4bt/Box °ßÀû ¹®ÀÇ
MC-MIBK-13 MIBK:IPA 1:2 MIBK:IPA/1:2, ¿ë·®£º4Lx4bt/Box °ßÀû ¹®ÀÇ
MC-MIBK-14 MIBK:IPA 1:3 MIBK:IPA/1:3, ¿ë·®£º4Lx4bt/Box °ßÀû ¹®ÀÇ
MICROCHEM / Omnicoat Resist
 
 

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¢¹Easy, fast, clean & safe removal
¢¹Uses existing strippers and processe
¢¹Uses a very thin coating
¢¹Adhesion Promoter

¢¹Allows easy stripping of hard to remove photoresists and other materials plus improved adhesion
¢¹Improves adhesion to difficult substrates like Au, Cu and Qua

 

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¢¹Æ÷Àå´ÜÀ§ : 500ml, 1000ml



 

   
MC-500-01 OCR-500 Omnicoat Resist, ¿ë·®£º500ml/bottle °ßÀû ¹®ÀÇ
MICROCHEM / PMGI Resists
 
 

 

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¢¹ À̹Ì¡¿¡ ³»¼ºÀÌ ÀÖÀ» °æ¿ì È¥ÇÕµÇÁö ¾Ê½À´Ï´Ù.

¢¹ G, H¿Í ȣȯµÇ´Â i-line, DUV, 192cm, E-beamÀº ÀúÇ×¼ºÀ» º¸ÀÔ´Ï´Ù.
¢¹½Ç¸®ÄÜ, Ni., GaA, InP ¹× ¸¹Àº ´Ù¸¥ III-V¹°Áú¿¡ ´ëÇÑ ¶Ù¾î³­ Á¢Âø·ÂÀ» º¸ÀÔ´Ï´Ù.

¢¹³ôÀº ¿­¿¡ ¾ÈÁ¤¼ºÀ» º¸ÀÔ´Ï´Ù. ( ~190 C)

¢¹±âÁ¸ÀÇ Conventional Resist StripperÀ» ºü¸£°í ±ò²ûÇÏ°Ô Á¦°ÅÇÕ´Ï´Ù.

¢¹³ôÀº »êÃâ, ¸Å¿ì µÎ²¨¿î(>3µm)±Ý¼Ó ¸®ÇÁÆ® ¿ÀÇÁ 󸮸¦ °¡´ÉÇÏ°Ô ÇÕ´Ï´Ù.

¢¹Sub 0.25¥ìm lift-off processing. 

   
MC-PMGI-11 PMGI SFG2 PMGI SFG2, ¿ë·® : 500ml/bottle °ßÀû ¹®ÀÇ
MC-PMGI-12 PMGI SF3 PMGI SF3, ¿ë·® : 500ml/bottle °ßÀû ¹®ÀÇ
MC-PMGI-13 PMGI SF4 PMGI SF4, ¿ë·® : 500ml/bottle °ßÀû ¹®ÀÇ
MC-PMGI-14 PMGI SF5 PMGI SF5, ¿ë·® : 500ml/bottle °ßÀû ¹®ÀÇ
MC-PMGI-15 PMGI SF6 PMGI SF6, ¿ë·® : 500ml/bottle °ßÀû ¹®ÀÇ
MC-PMGI-16 PMGI SF7 PMGI SF7, ¿ë·® : 500ml/bottle °ßÀû ¹®ÀÇ
MC-PMGI-17 PMGI SF8 PMGI SF8, ¿ë·® : 500ml/bottle °ßÀû ¹®ÀÇ
MC-PMGI-18 PMGI SF9 PMGI SF9, ¿ë·® : 500ml/bottle °ßÀû ¹®ÀÇ
MC-PMGI-19 PMGI SF10 PMGI SF10, ¿ë·® : 500ml/bottle °ßÀû ¹®ÀÇ
MC-PMGI-20 PMGI SF11 PMGI SF11, ¿ë·® : 500ml/bottle °ßÀû ¹®ÀÇ
MC-PMGI-21 PMGI SF12 PMGI SF12, ¿ë·® : 500ml/bottle °ßÀû ¹®ÀÇ
MC-PMGI-22 PMGI SF13 PMGI SF13, ¿ë·® : 500ml/bottle °ßÀû ¹®ÀÇ
MICROCHEM / PMMA
 
 

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¢¹PMMA (polymethyl methacrylate) is a versatile polymeric material that is well suited for many imaging and non-imaging microelectronic applications.

¢¹Most commonly used as a high resolution positive resist for direct write e-beam as well as x-ray and deep UV microlithographic processes.

¢¹Also used as a protective coating for wafer thinning, as a bonding adhesive and as a sacrificial layer.
¢¹Standard PMMA products cover a wide range of film thicknesses and are formulated with 495,000 & 950,000 molecular weight (MW) resins in either chlorobenzene or the safer solvent anisole.

 

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¢¹All MCC PMMA resists are available in package sizes from 500ml to 20 liters.

   
MC-400-10 400 PMMA A3 400 PMMA A3, ¿ë·®£º500ml/bottle °ßÀû ¹®ÀÇ
MC-400-11 495 PMMA A4 495 PMMA A4, ¿ë·®£º500ml/bottle °ßÀû ¹®ÀÇ
MC-400-12 495 PMMA A5 495 PMMA A5, ¿ë·®£º500ml/bottle 1,210,000(VATº°µµ)
MC-400-13 495 PMMA A6 495 PMMA A6, ¿ë·®£º500ml/bottle °ßÀû ¹®ÀÇ
MC-400-14 495 PMMA C2 495 PMMA C2, ¿ë·®£º500ml/bottle °ßÀû ¹®ÀÇ
MC-900-16 950 PMMA A2 950 PMMA A2, ¿ë·®£º500ml/bottle °ßÀû ¹®ÀÇ
MC-900-17 950 PMMA A3 950 PMMA A3, ¿ë·®£º500ml/bottle °ßÀû ¹®ÀÇ
MC-900-11 950 PMMA A4 950 PMMA A4, ¿ë·®£º500ml/bottle 1,270,000(VATº°µµ)
MC-900-12 950 PMMA A5 950 PMMA A5, ¿ë·®£º500ml/bottle °ßÀû ¹®ÀÇ
MC-900-13 950 PMMA A8 950 PMMA A8, ¿ë·®£º500ml/bottle °ßÀû ¹®ÀÇ
MC-900-14 950 PMMA C2 950 PMMA C2, ¿ë·®£º500ml/bottle °ßÀû ¹®ÀÇ
MC-900-15 950 PMMA C4 950 PMMA C4, ¿ë·®£º500ml/bottle °ßÀû ¹®ÀÇ
MC-900-18 950 PMMA C9 950 PMMA C4, ¿ë·®£º500ml/bottle °ßÀû ¹®ÀÇ
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