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 HOME > PRODUCT > 웨이프&약품류 |
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 ZEON / E-Beam Lithography Resist |
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◆특징 ▷High resolution (sub-10-nm) ▷Excellent etch resistance – dry and wet etch ▷High sensitivity ▷Strong adhesion to most substrates ▷Thermal stability ▷High contrast ▷High aspect ratio ▷Processing stability ▷No post exposure bake ▷Shipping and storage at room temperature ▷Post coat delay ▷Post exposure delay 
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