HOME > PRODUCT > ¿þÀÌÇÁ&¾àÇ°·ù
DisChem / Photo & E-beam Resist
 
 

¡ßDescription

¢¹H-SiQ is characterized by excellent pitch resolution, sensitivity and etch resistance for 

   direct write thin film EBL applications.

 

¢¹​DisChem H-SiQ is a negative tone hydrogen silesquioxane resist derived from dry silica 

   resin (H-SiOx) in MIBK carrier solvent for use in electron beam lithography (EBL).

 

¢¹​Thickness: 25 nm - 800 nm

   
DC-HSIQ6% H-SiQ 6% 50ml 3,550,000(VATº°µµ)
DONGJIN CHEM / Etchant
 
 
¡ßƯ¡
¢¹TFT-LCD ¹× Display panelÀÇ metal ¹è¼±À» Çü¼ºÇϴµ¥ Àû¿ëµÇ´Â Chemical ÀÔ´Ï´Ù.

¢¹Source and Drain, Gate, PixelÀÇ ´Ù¾çÇÑ ±Ý¼Ó¹è¼±¿¡ Àû¿ëµÇ¸ç Pattern¿¡ »ç¿ëµÇ´Â ´Ù¾çÇÑ MetalÀÇ Á¾·ù¿¡ ÀûÇÕÇÑ Etchant ÀÔ´Ï´Ù.
   
DJ-3000-01 DME-300 Ga/bt Mo Etchant, Æ÷Àå´ÜÀ§£ºGa/bt °ßÀû ¹®ÀÇ
DONGWOO FINE CHEM / Etchant
 
 
¡ßƯ¡
¢¹TFT-LCD ¹× Display panelÀÇ metal ¹è¼±À» Çü¼ºÇϴµ¥ Àû¿ëµÇ´Â Chemical ÀÔ´Ï´Ù.
¢¹Source and Drain, Gate, PixelÀÇ ´Ù¾çÇÑ ±Ý¼Ó¹è¼±¿¡ Àû¿ëµÇ¸ç Pattern¿¡ »ç¿ëµÇ´Â ´Ù¾çÇÑ MetalÀÇ Á¾·ù¿¡ ÀûÇÕÇÑ Etchant ÀÔ´Ï´Ù.
¢¹HCl Type
   
DW-2100-02 MA-S02 ITO Etchant, Æ÷Àå´ÜÀ§£º20L/bt °ßÀû ¹®ÀÇ
DONGWOO FINE CHEM / Photoresist
 
 

¡ßƯ¡
¢¹ ¹ÝµµÃ¼¿ë PR(°¨±¤¾×)

 

 

   
CT-5500-01 PFI-DW38A9 Photoresist(i-line PR), Æ÷Àå´ÜÀ§£ºGa/bt, À¯È¿±â°££º1³â 980,000(VATº°µµ)
DOW / Advanced Electronics Resin(Photo BCB) * CYCLOTENE 3000 Series
 
 

¡ßƯ¡

¢¹ Etchable in oxygen/fluorine plasmas (O2/CF4, O2/SF6, O2/NF3) Laser etchable

    Planarization — ca. 90% over isolated features (< 100µm)

 

 

 

 

 

   
DW-3044-01 3022-35 Thickness Range : 1.0 ~ 2.4¥ìm, ½Ç¿Â¿¡¼­ º¸°ü °ßÀû ¹®ÀÇ
DW-3044-02 3022-46 Thickness Range : 2.4 ~ 5.8¥ìm, ½Ç¿Â¿¡¼­ º¸°ü °ßÀû ¹®ÀÇ
DW-3044-03 3022-57 Thickness Range : 5.7 ~ 15.6¥ìm, ½Ç¿Â¿¡¼­ º¸°ü 0(VATº°µµ)
DW-3044-04 3022-63 Thickness Range : 9.5 ~ 26.0¥ìm, ½Ç¿Â¿¡¼­ º¸°ü 0(VATº°µµ)
1.2.3.4.5.6.7.8.9.10